Measuring electrical current during scanning probe oxidation

Measuring electrical current during scanning probe oxidation

Advanced oxidation scanning probe lithography.

Force microscopy enables a variety of approaches to manipulate and/or modify surfaces. Few of those methods have evolved into advanced probe-based lithographies. Oxidation scanning probe lithography (o-SPL) is the only lithography that enables the direct and resist-less nanoscale patterning of a large variety of materials, from metals to semiconductors; from self-assembled monolayers to biomole...

Electrical modes in scanning probe microscopy.

Scanning probe microscopy methods allow the investigation of a variety of sample surface properties on a nanometer scale, even down to single molecules. As molecular electronics advance, the characterization of electrical properties becomes more and more important. In both research and industry, films made from composite materials and lithographically structured elements have already reached st...

Silicon microlens structures fabricated by scanning-probe gray-scale oxidation.

We report on the micromachining of silicon microlens structures by use of scanning-probe gray-scale anodic oxidation along with dry anisotropic etching. Convex, concave, and arbitrarily shaped silicon microlenses with diameters as small as 2 microm are demonstrated. We also confirm the high fidelity of pattern transfer between the probe-induced oxides and the etched silicon microlens structures...

Studying of various nanolithography methods by using Scanning Probe Microscope

The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithog...